| 提供服務 | Ambient Conditions of the Site | ||||||||
| 超恆溫空調系統 | Room temperature specification | Humidity | |||||||
| Practical operation | |||||||||
| 20℃ / 0.1℃ P-P / 24hr | ＜70%RH | ||||||||
| 主動式除振台 | Floor vibration | Horizontal | Vertical | ||||||
| 1~10Hz | >10Hz | 1~10Hz | >10Hz | ||||||
| VC-G | VC-F | VC-F | VC-E | ||||||
| 主動式磁場補償系統 | Megnetic fields | Horizontal | Vertical | ||||||
| < 30nT | < 50nT | ||||||||
| 噪音系統 | Acoustics | Octband | |||||||
| <60dB | |||||||||
電子顯微鏡實驗室環境建造及控制技術
「空調/振動/磁場/噪音」
Room Cleanliness
The proposed site must be clean of dust. The advised dust class in ISO 8.
| Class | Maximum Particles/m3 | FED STD 209E equivalent | |||||
|---|---|---|---|---|---|---|---|
| ≧0.1 µm | ≧0.2 µm | ≧0.3 µm | ≧0.5 µm | ≧1 µm | ≧5 µm | ||
| ISO 1 | 10 | 2 | |||||
| ISO 2 | 100 | 24 | 10 | 4 | |||
| ISO 3 | 1,000 | 237 | 102 | 35 | 8 | Class1 | |
| ISO 4 | 10,000 | 2,370 | 1,020 | 352 | 83 | Class10 | |
| ISO 5 | 100,000 | 23,700 | 10,200 | 3,520 | 830 | 29 | Class100 |
| ISO 6 | 1,000,000 | 237,000 | 102,000 | 35,200 | 8,300 | 293 | Class1K |
| ISO 7 | 352,000 | 83,000 | 2,930 | Class10K | |||
| ISO 8 | 3,520,000 | 830,000 | 29,300 | Class100K | |||
| ISO 9 | 35,200,000 | 8,300,000 | 293,000 | Room air | |||